Efficient Airflow Design for Cleanrooms Improves Business Bottom Lines

ESTECH 2003: 49th Annual Technical Meeting and Exposition of the Institute of Environmental Science and Technology. Proceedings Constamination Control Design, Test, and Evaluation Product Reliability

Volumn , Issue , 2003, Pages 90-98

  Xu, Tengfang ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Airflow; Business bottom line; Cleanroom; Contamination control; Cost savings; Design; Energy efficiency; High performance; Maintenance; Operation; Return of investment

Indexed keywords

AIRFLOW; BUSINESS BOTTOM LINES; CONTAMINATION CONTROL; COST SAVINGS; HIGH PERFORMANCE; OPERATION; RETURN OF INVESTMENT;

AIR CONDITIONING; CONTAMINATION; COSTS; ENERGY EFFICIENCY; HEATING; MAINTENANCE; RELIABILITY; STANDARDS; VENTILATION;

CLEAN ROOMS;

EID: 1842611936     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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