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Volumn , Issue , 2001, Pages 96-99
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General treatment of the effect of stress on defect diffusion in Si
a b c |
Author keywords
Defects; Diffusion; Pressure effects
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Indexed keywords
ANISOTROPIC DIFFUSION;
CRYSTALLINITY;
ISOTROPIC DIFFUSION;
VACANCY DIFFUSION;
ANISOTROPY;
DEFECTS;
DOPING (ADDITIVES);
PRESSURE EFFECTS;
SILICON;
STRESS ANALYSIS;
DIFFUSION;
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EID: 6344243523
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (11)
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