Arrays of addressable high-speed optical microshutters

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 232-235

  Perregaux, Grégoire ^a   Gonseth, Stéphan ^a   Debergh, Patrick ^a   Thiébaud, Jean Philippe ^a   Vuilliomenet, Henri ^a  

^a CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; ELECTRIC FIELD EFFECTS; MICROLENSES; OPTICAL COLLIMATORS; OPTICAL SWITCHES; POLYSILICON; SCANNING ELECTRON MICROSCOPY; STICTION;

OPTICAL MICROSHUTTERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035008297     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906521     Document Type: Article

References (0)