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Volumn 311, Issue 7, 2009, Pages 1684-1687
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A study of the doping influence on strain relaxation of graded composition InGaAs layers grown by molecular beam epitaxy
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Author keywords
A1. Dislocations; A1. Doping; A3. Molecular beam epitaxy; A3. Semiconducting III V materials
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Indexed keywords
CRYSTAL GROWTH;
MOLECULAR BEAM EPITAXY;
MOLECULAR DYNAMICS;
SEMICONDUCTING INDIUM;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR QUANTUM WIRES;
STRAIN CONTROL;
STRAIN RELAXATION;
SURFACE ROUGHNESS;
A1. DISLOCATIONS;
A1. DOPING;
A3. MOLECULAR BEAM EPITAXY;
A3. SEMICONDUCTING III-V MATERIALS;
GRADED COMPOSITIONS;
LINEAR GRADING;
MATERIAL PROPERTIES;
METAMORPHIC DEVICES;
N-TYPE DOPING;
P TYPES;
SI-DOPING;
THREADING DISLOCATION DENSITIES;
MOLECULAR BEAMS;
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EID: 63349083356
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcrysgro.2008.11.019 Document Type: Article |
Times cited : (18)
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References (12)
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