Mixed product run-to-run process control - An ANOVA model with ARIMA disturbance approach

Journal of Process Control

Volumn 19, Issue 4, 2009, Pages 604-614

  Ma, Ming Da ^a   Chang, Chun Cheng ^b   Jang, Shi Shang ^b   Wong, David Shan Hill ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

ARIMA disturbance model; Dynamic ANOVA; Mixed product system; Run to run control

Indexed keywords

ANALYSIS OF VARIANCE (ANOVA); DYNAMIC ANALYSIS; DYNAMIC MODELS; REGRESSION ANALYSIS;

ANOVA ANALYSIS; ANOVA MODELS; ARIMA DISTURBANCE MODEL; AUTO-REGRESSIVE INTEGRATED MOVING AVERAGES; CONTROLLER PERFORMANCE; MIXED PRODUCT SYSTEM; PROCESS MODELS; PRODUCT CONTROLS; RUN TO RUNS; RUN-TO-RUN CONTROL; RUN-TO-RUN PROCESS CONTROLS; SYSTEM OUTPUTS; UNKNOWN DISTURBANCES;

PROCESS CONTROL;

EID: 63249110599     PISSN: 09591524     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jprocont.2008.09.002     Document Type: Article

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