Just-in-time adaptive disturbance estimation for run-to-run control of semiconductor processes

IEEE Transactions on Semiconductor Manufacturing

Volumn 19, Issue 3, 2006, Pages 298-315

  Firth, Stacy K ^a   Campbell, W Jarrett ^b   Toprac, Anthony ^c   Edgar, Thomas F ^d  

^a SKF Consulting   (United States)

^b Schneider Electric   (United States)

^c A Toprac Consultancy Inc   (United States)

^d The University of Texas at Austin   (United States)

Author keywords

Advanced process control; Parameter estimation; Run to run control

Indexed keywords

ALGORITHMS; CONTROL SYSTEM ANALYSIS; ELECTRONICS INDUSTRY; PARAMETER ESTIMATION; PROCESS CONTROL;

ADVANCED PROCESS CONTROL; JUST-IN-TIME ADAPTIVE DISTURBANCE ESTIMATION (JADE); RUN-TO-RUN CONTROL; SEMICONDUCTOR INDUSTRY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 33747434498     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2006.879409     Document Type: Article

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