Leading edge Atomic Layer Deposition applications

ECS Transactions

Volumn 16, Issue 4, 2009, Pages 19-27

  Sundaram, G M ^a   Monsma, D J ^a   Becker, J S ^a  

^a Cambridge NanoTech Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; GRAPHENE; SOLID OXIDE FUEL CELLS (SOFC);

EMERGENT TECHNOLOGIES; FUNCTIONALIZATIONS; GATE OXIDE; LOW VAPOR PRESSURES; UNIFORM DEPOSITION;

ATOMIC LAYER DEPOSITION;

EID: 63149121793     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2979977     Document Type: Conference Paper

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