A micron-sized nanoporous multifunction sensing device

Physica Status Solidi (A) Applications and Materials Science

Volumn 206, Issue 3, 2009, Pages 435-441

  Moreno I Codinachs, L ^a   Birkenstock, C ^a   Garma, T ^a   Zierold, R ^b   Bachmann, J ^b   Nielsen, K ^b   Schoming M J ^c,d   Fontcuberta I Morral, A ^a  

^a WALTER SCHOTTKY INSTITUT   (Germany)

^b UNIVERSITY OF HAMBURG   (Germany)

^c AACHEN UNIVERSITY OF APPLIED SCIENCES   (Germany)

^d FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA PORES; ANODIC ALUMINIUM OXIDES; ATOMIC-LAYER DEPOSITIONS; CAPACITIVE SENSORS; HYSTERESIS EFFECTS; NANO-POROUS; PH MEASUREMENTS; POROUS STRUCTURES; REPRODUCIBILITY; SENSING DEVICES;

ALUMINA; ATOMIC LAYER DEPOSITION; HYSTERESIS; SILICON COMPOUNDS; TEMPERATURE MEASUREMENT;

SENSORS;

EID: 63049105346     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200880472     Document Type: Article

References (21)

1. F. Patolsky, G. Zheng, and C. M. Lieber, Anal. Chem. 78, 4260 (2006).
2. J. Sarkar, G. G. Khan, and A. Basumallick, Bull. Mater. Sci. 30, 271 (2007).
3. T. P. Hoar and N. F. Mott, J. Phys. Chem. Solids 9, 97 (1959).
4. G. E. Thomson, R. C. Furneaux, G. C. Wood, J. A. Richardson, and J. S. Goode, Nature 272, 433 (1978).
5. G. E. Thompson and G. C. Wood, Nature 290, 230 (1981).
6. H. Masuda and F. Fukuta, Science 268, 1466 (1995).
7. A. P. Li, F. Müller, A. Birner, K. Nielsch, and U. Gösele, J. Appl. Phys. 84, 6023 (1998).
8. H. Masuda, K. Nishio, and N. Baba, Appl. Phys. Lett. 63, 3155 (1993).
9. C. S. Cojocaru, J. M. Padovani, T. Wade, C. Mandoli, G. Jaskierowicz, J. E. Wegrowe, A. Fontcuberta i Morral, and D. Pribat, Nano Lett. 5, 675 (2005).
10. Y. Xiang, W. Lee, K. Nielsch, G. Abstreiter, and A. Fontcuberta i Morral, Phys. Status Solidi RRL 2, 59 (2008).
11. M. Knez, K. Nielsch, and L. Niinisto, Adv. Mater. 19, 3425 (2007).
12. O. K. Varghese, D. Gong, M. Paulose, K. G. Ong, C. A. Grimes, and E. C. Dickey, J. Mater. Res. 17, 1162 (2002).
13. R. K. Nahar, Sens. Actuators B 63,49 (2000).
14. V. Timár-Horváth, L. Juhász, A. Vass-Várnai, and G. Perlaky, Proceedings DTIP of MEMS & MOEMS, Italy (2007).
15. PHYWE series of publications, Lab experiments, PHYWE SYSTEME GMBH, 37070 Göttingen, Germany (2001).
16. D. C. Thompson, J. Papapolymerou, and M. M. Tentzeris, IEEE Microw. Wirel. Compon. Lett. 15, 561 (2005).
17. A. J. Bard and L. R. Faulkner, Electrochemical Methods: Fundamentals and Applications, 2nd ed. (John Wiley & Sons, 2001), chaps. 1 and 13.
18. J. Bachmann, R. Zierold, Y. T. Chong, R. Hauert, C. Sturm, R. Schmidt-Grund, B. Rheinländer, M. Grundmann, U. Gösele, and K. Nielsch, Angew. Chem. Int. Ed. 47, 6177 (2008).
19. S. Wen and D. D. L. Chung, J. Electron. Packag. 23, 235 (2005).
20. L.-Y. Chen, ICEPT 2007, 8th International Conference on Electronic Packagaging Technology, 2007, pp. 1-6.
21. J. Antula, Phys. Lett. A 25, 308 (1967).