Electropolishing of high-purity aluminium in perchloric acid and ethanol solutions

Corrosion Science

Volumn 51, Issue 4, 2009, Pages 713-718

  Ma, Di ^a   Li, Shuying ^a   Liang, Chenghao ^a,b  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b DALIAN MARITIME UNIVERSITY   (China)

Author keywords

A. Aluminium; B. AFM; B. EIS; B. Polarization; C. Amorphous structures

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; DISSOLUTION; ELECTROCHEMICAL CORROSION; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; ELECTROLYTIC POLISHING; ETHANOL; INORGANIC ACIDS; MICROSCOPES; POLARIZATION; SCANNING ELECTRON MICROSCOPY; ULTRASONIC MEASUREMENT;

A. ALUMINIUM; B. AFM; B. EIS; B. POLARIZATION; C. AMORPHOUS STRUCTURES;

ALUMINUM;

EID: 62849095531     PISSN: 0010938X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.corsci.2009.01.030     Document Type: Article

References (42)

1. Jessensky O., Muller F., and Gosele U. Self-organized formation of hexagonal pore structures in anodic alumina. J. Electrochem. Soc. 145 (1998) 3735-3740
2. Keller F., Hunter M.S., and Robinson D.L. Structural features of oxide coatings on aluminum. J. Electrochem. Soc. 100 (1953) 411-419
3. Masuda H., Hasegwa F., and Ono S. Self-ordering of cell arrangement of anodic porous alumina formed in sulfuric acid solution. J. Electrochem. Soc. 144 (1997) L127-130
4. Masuda H., Yamada H., Satoh M., Asoh H., Nakao M., and Tamamura T. Highly ordered nanochannel-array architecture in anodic alumina. Appl. Phys. Lett. 71 (1997) 2770-2772
5. Duan X., Huang Y., Cui Y., Wang J., and Lieber C.M. Indium phosphide nanowires as building blocks for nanoscale electronic and optoelectronic devices. Nature 409 (2001) 66-69
6. Matsumoto F., Ishikawa M., Nishio K., and Masuda H. Optical properties of long-range-ordered, high-density gold nanodot arrays prepared using anodic porous alumina. Chem. Lett. 34 (2005) 508-509
7. Whitney T.M., Jiang J.S., Searson P.C., and Chien C.L. Fabrication and magnetic properties of arrays of metallic nanowires. Science 261 (1993) 1316-1319
8. Bandyopadhyay S. Self-assembled quantum dots: the route to novel optical, electronic, magnetic and superconducting properties. Bull. Mater. Sci. 22 (1999) 537-542
9. Bandyopadhyay S., Miller A.E., Chang H.C., Banerjee G., Yuzhakov V., Yue D.-F., and Ricker R.E. Electrochemically assembled quasi-periodic quantum dot arrays. Nanotechnology 7 (1996) 360-371
10. Chik H., and Xu J.M. Nanometric superlattices: non-lithographic fabrication, materials, and prospects. Mater. Sci. Eng. R 43 (2004) 103-138
11. Masuda H., and Fukuda K. Ordered metal nanohole arrays made by a two-step replication of honeycomb structures of anodic alumina. Science 268 (1995) 1466-1468
12. Saito M., Shibasaki M., Nakamura S., and Miyagi M. Optical waveguides fabricated in anodic alumina films. Opt. Lett. 19 (1994) 710-712
13. Yuzhakov V.V., Chang H.C., and Miller A.E. Pattern formation during electropolishing. Phys. Rev. B 56 (1997) 12608-12624
14. Yuzhakov V.V., Takhistov P.V., Miller A.E., and Chang H.-C. Pattern selection during electropolishing due to double-layer effects. Chaos 9 (1999) 62
15. Ricker R.E., Miller A.E., Yue D.F., Banerjee G., and Bandyopadhyay S. Nanofabrication of a quantum dot array: atomic force microscopy of electropolished aluminum. J. Electron. Mater. 25 (1996) 1585-1592
16. Liu H.W., Guo H.M., Wang Y.L., Wang Y.T., Shen C.M., and Weib L. Self-assembled stripes on the anodic aluminum oxide by atomic force microscope observation. Appl. Surf. Sci. 219 (2003) 282-289
17. Li F., Zhang L., and Metzger R.M. On the growth of highly ordered pores in anodized aluminum oxide. Chem. Mater. 10 (1998) 2470-2480
18. Li A.P., Müller F., and Gösele U. Polycrystalline and monocrystalline pore arrays with large interpore distance in anodic alumina. Electrochem. Solid State Lett. 3 (2000) 131-134
19. Li A.P., Müller F., Birner A., Nielsch K., and Gösele U. Polycrystalline nanopore arrays with hexagonal ordering on aluminum. J. Vac. Sci. Technol. A 17 (1999) 1428-1431
20. Li A.P., Muller F., Birner A., Nielsch K., and Gosele U. Fabrication and microstructuring of hexagonally ordered two-dimensional nanopore arrays in anodic alumina. Adv. Mater. 11 (1999) 483-487
21. Li A.P., Muller F., Birner A., Nielsch K., and Gosele U. Hexagonal pore arrays with a 50-420 nm interpore distance formed by self-organization in anodic alumina. J. Appl. Phys. 84 (1998) 6023-6026
22. Guo W., and Johnson D.T. Pattern selection with anisotropy during aluminum electropolishing. J. Cryst. Growth 268 (2004) 258-271
23. Guo W., and Johnson D. Role of interfacial energy during pattern formation of electropolishing. Phys. Rev. B 67 (2003) 075411
24. Crouse D., Lo Y.-H., Miller A.E., and Crouse M. Self-ordered pore structure of anodized aluminum on silicon and pattern transfer. Appl. Phys. Lett. 76 (2000) 49-51
25. Ba L., and Li W.S. Influence of anodizing conditions on the ordered pore formation in anodic alumina. J. Phys. D Appl. Phys. 33 (2000) 2527-2531
26. Masuda H., Yada K., and Osaka A. Self-ordering of cell configuration of anodic porous alumina with large-size pores in phosphoric acid solution. Jpn. J. Appl. Phys. 37 (1998) L1340-L1342
27. Masuda H., and Satoh M. Fabrication of gold nanodot array using anodic porous alumina as an evaporation mask. Jpn. J. Appl. Phys. 35 (1996) L126-L129
28. 2 films using two-step replication of microstructure of anodic alumina. Jpn. J. Appl. Phys. 31 (1992) 1775-1777
29. Yu C.U., Hu C.C., Bai A., and Yang Y.F. Pore-size dependence of AAO films on surface roughness of Al-1050 sheets controlled by electropolishing coupled with fractional factorial design. Surf. Coat. Technol. 201 (2007) 7259-7265
30. Zhao G.Y., Xu C.L., Guo D.J., Li H., and Li H.L. Patterning polycrystalline aluminum by electropolishing at low voltages. J. Solid State Electrochem. 10 (2006) 266-269
31. Konovalov V., Zangari G., and Metzger R. Highly ordered nanotopographies on electropolished aluminum single crystals. Chem. Mater. 11 (1999) 1949-1951
32. Jacquet P.A. Metal Finishing 47 (1949) 48
33. Wagner C. Contribution to the theory of electropolishing. J. Electrochem. Soc. 101 (1954) 225-228
34. Landolt D. Fundamental aspects of electropolishing. Electrochim. Acta 32 (1987) 1-11
35. Huo J., Solanki R., and McAndrew J. Electrochemical polishing of copper for microelectronic applications. Surf. Eng. 19 (2003) 11-16
36. Landolt D., Chauvy P.F., and Zinger O. Electrochemical micromachining, polishing and surface structuring of metals: fundamental aspects and new developments. Electrochim. Acta 48 (2003) 3185-3201
37. Grimm R.D., and Landolt D. Salt films formed during mass transport controlled dissolution of iron-chromium alloys in concentrated chloride media. Corrosion Science 36 (1994) 1847-1868
38. Grimm R.D., West A.C., and Landolt D. AC impedance study of anodically formed salt films on iron in chloride solution. J. Electrochem. Soc. 139 (1992) 1622-1629
39. Matlosz M., Magaino S., and Landolt D. Impedance analysis of a model mechanism for acceptor-limited electropolishing. J. Electrochem. Soc. 141 (1994) 410-418
40. Magaino S., Matlosz M., and Landolt D. An impedance study of stainless steel electropolishing. J. Electrochem. Soc. 140 (1993) 1365-1373
41. Vidal R., and West A.C. Copper electropolishing in concentrated phosphoric acid II. Theoretical interpretation. J. Electrochem. Soc. 142 (1995) 2689-2694
42. Matlosz M. Modeling of impedance mechanisms in electropolishing. Electrochim. Acta 40 (1995) 393-401