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Volumn 30, Issue 3, 2009, Pages 269-271

Reliability of nanoelectromechanical nonvolatile memory (NEMory) cells

Author keywords

Nanoelectromechanical nonvolatile memory (NEMory); Reliability

Indexed keywords

DURABILITY;

EID: 62549131194     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2008.2010879     Document Type: Article
Times cited : (7)

References (5)
  • 1
    • 0036105871 scopus 로고    scopus 로고
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    • C.-G. Hwang, "Semiconductor memories for IT era," in Proc. IEEE ISSCC Tech. Dig., 2002, pp. 24-27.
    • (2002) Proc. IEEE ISSCC Tech. Dig , pp. 24-27
    • Hwang, C.-G.1
  • 2
    • 50249178598 scopus 로고    scopus 로고
    • Compact nanoelectro-mechanical non-volatile memory (NEMory) for 3D integration
    • Dec
    • W. Y. Choi, H. Kam, D. Lee, J. Lai, and T.-J. K. Liu, "Compact nanoelectro-mechanical non-volatile memory (NEMory) for 3D integration," in IEDM Tech. Dig., Dec. 2007, pp. 603-606.
    • (2007) IEDM Tech. Dig , pp. 603-606
    • Choi, W.Y.1    Kam, H.2    Lee, D.3    Lai, J.4    Liu, T.-J.K.5
  • 3
    • 0032304155 scopus 로고    scopus 로고
    • Adhesion of polysilicon microbeams in controlled humidity ambients
    • M. P. de Boer, P. J. Clews, B. K. Smith, and T. A. Michalske, "Adhesion of polysilicon microbeams in controlled humidity ambients," in Proc. Mater. Res. Soc., 1998, vol. 518, pp. 131-136.
    • (1998) Proc. Mater. Res. Soc , vol.518 , pp. 131-136
    • de Boer, M.P.1    Clews, P.J.2    Smith, B.K.3    Michalske, T.A.4
  • 4
    • 50249106960 scopus 로고    scopus 로고
    • G. Van den bosch, A. Furnémont, M. B. Zahid, R. Degraeve, L. Breuil, A. Cacciato, A. Rothschild, C. Olsen, U. Ganguly, and J. Van Houdt, Nitride engineering for improved erase performance and retention of TANOS NAND Flash memory, in Proc. NVSMW/ICMTD, 2008, pp. 128-129.
    • G. Van den bosch, A. Furnémont, M. B. Zahid, R. Degraeve, L. Breuil, A. Cacciato, A. Rothschild, C. Olsen, U. Ganguly, and J. Van Houdt, "Nitride engineering for improved erase performance and retention of TANOS NAND Flash memory," in Proc. NVSMW/ICMTD, 2008, pp. 128-129.
  • 5
    • 40849092892 scopus 로고    scopus 로고
    • W. W. Jang, J. O. Lee, J.-B. Yoon, M.-S. Kim, J.-M. Lee, S.-M. Kim, K.-H. Cho, D.-W. Kim, D. Park, and W.-S. Lee, Fabrication and characterization of a nanoelectromechanical switch with 15-nm-thick suspension air gap, Appl. Phys. Lett., 92, no. 10, pp. 103 110-1-103 110-3, Mar. 2008.
    • W. W. Jang, J. O. Lee, J.-B. Yoon, M.-S. Kim, J.-M. Lee, S.-M. Kim, K.-H. Cho, D.-W. Kim, D. Park, and W.-S. Lee, "Fabrication and characterization of a nanoelectromechanical switch with 15-nm-thick suspension air gap," Appl. Phys. Lett., vol. 92, no. 10, pp. 103 110-1-103 110-3, Mar. 2008.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.