Equilibrium of dissolving species in aqueous H2SiF6 solution during the liquid phase deposition reaction

Journal of the Ceramic Society of Japan

Volumn 117, Issue 1363, 2009, Pages 335-339

  Mizuhata, Minoru ^a   Saito, Yasuhiro ^a   Takee, Masao ^a   Deki, Shigehito ^a  

^a KOBE UNIVERSITY   (Japan)

Author keywords

Liquid phase deposition; Thin films

Indexed keywords

BORIC ACID; METALS; THIN FILMS;

AL-METAL; DEPOSITION PROCESS; EQUILIBRIUM REACTIONS; LIQUID PHASE DEPOSITIONS (LPD); METAL OXIDES;

DEPOSITION;

EID: 62449169554     PISSN: 18820743     EISSN: 13486535     Source Type: Journal    
DOI: 10.2109/jcersj2.117.335     Document Type: Article

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