High-quality ZnO nanowire arrays directly fabricated from photoresists

ACS Nano

Volumn 3, Issue 1, 2009, Pages 53-58

  Cheng, Chun ^a   Lei, Ming ^a   Feng, Lin ^a   Wong, Tai Lun ^a   Ho, K M ^a   Fung, Kwok Kwong ^a   Loy, Michael M T ^a   Yu, Dapeng ^b   Wang, Ning ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b PEKING UNIVERSITY   (China)

Author keywords

Antireflection; Graphite; Nanowire array; Pattern; Photoresist; Zinc oxide

Indexed keywords

COMMUNICATION CHANNELS (INFORMATION THEORY); ELECTRIC WIRE; GRAPHITE; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; PHOTORESISTORS; PHOTORESISTS; SEMICONDUCTING ZINC COMPOUNDS; SURFACE TREATMENT; ZINC; ZINC OXIDE;

ANTIREFLECTION; CRYSTAL QUALITIES; GROWTH DIRECTIONS; HIGH QUALITIES; IDEAL ELECTRODES; NANOWIRE ARRAY; PATTERN; ZNO NANOMATERIALS; ZNO NANOWIRE ARRAYS; ZNO NANOWIRES;

NANOWIRES;

GOLD; METAL NANOPARTICLE; NANOPARTICLE; NANOWIRE; SILICON; ZINC OXIDE;

ARTICLE; CHEMICAL MODEL; CHEMISTRY; CRYSTALLIZATION; ELECTROCHEMISTRY; METHODOLOGY; NANOTECHNOLOGY; PHOTOCHEMISTRY; RAMAN SPECTROMETRY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

CRYSTALLIZATION; ELECTROCHEMISTRY; GOLD; METAL NANOPARTICLES; MICROSCOPY, ELECTRON, SCANNING; MICROSCOPY, ELECTRON, TRANSMISSION; MODELS, CHEMICAL; NANOPARTICLES; NANOTECHNOLOGY; NANOWIRES; PHOTOCHEMISTRY; SILICON; SPECTRUM ANALYSIS, RAMAN; ZINC OXIDE;

EID: 61849148374     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn800527m     Document Type: Article

References (35)

1. Lee, S. W.; Jeong, M. C.; Myoung, J. M. Magnetic Alignment of ZnO Nanowires for Optoelectronic Device Applications. Appl. Phys. Lett. 2007, 90, 133115-1-133115-3.
2. Wang, X. D.; Zhou, J.; Song, J. H.; Liu, J.; Xu, N.; Wang, Z. L. Piezoelectric Field Effect Transistor and Nanoforce Sensor Based on a Single ZnO Nanowire. Nano Lett. 2006, 6, 2768-2772.
3. Zimmler, M. A.; Stichtenoth, D.; Ronning, C.; Yi, W.; Narayanamurti, V.; Voss, T.; Capasso, F. Scalable Fabrication of Nanowire Photonic and Electronic Circuits Using Spin-On Glass. Nano Lett. 2008, 8, 1695-1699.
4. Yang, P.; Yan, H.; Mao, S.; Russo, R.; Johnson, J; Saykally, R.; Morris, N.; Pham, J.; He, R.; Choi, H. J. Controlled Growth of ZnO Nanowires and Their Optical Properties. Adv. Fun. Mater. 2002, 12, 323-331.
5. Wang, X. D.; Song, J. H.; Liu, J.; Wang, Z. L. Direct-Current Nanogenerator Driven by Ultrasonic Waves. Science 2007, 316, 102-105.
6. Lee, Y. J.; Ruby, D. S.; Peters, D. W.; McKenzie, B. B.; Hsu, J. W. P. ZnO Nanostructures as Efficient Antireflection Layers in Solar Cells. Nano Lett. 2008, 8, 1501-1505.
7. Sun, X. W.; Wang, J. X. Fast Switching Electrochromic Display Using a Viologen-Modified ZnO Nanowire Array Electrode. Nano Lett. 2008, 8, 1884-1889.
8. Fan, H. J.; Werner, P.; Zacharias, M. Semiconductor Nanowires: From Self-Organization to Patterned Growth. Small 2006, 2, 700-717.
9. Collins, C. B.; Carlson, R. O.; Gallagher, C. Properties of Gold-Doped Silicon. Phys. Rev. 1957, 105, 1168-1173.
10. Oh, S. H.; van Benthem, K.; Molina, S. I.; Borisevich, A. Y.; Luo, W.; Werner, P.; Zakharov, N. D.; Kumar, D.; Pantelides, S. T.; Pennycook, S. J. Point Defect Configurations of Supersaturated Au Atoms Inside SI Nanowires. Wono Lett. 2008, 5, 1016-1019.
11. Greene, L.; Law, M.; Tan, D. H.; Goldberger, J.; Yang, P. General Route to Vertical ZnO Nanowire Arrays Using Textured ZnO Seeds. Nano Lett. 2005, 5, 1231-1236.
12. Wu, J. J.; Liu, S. C. Low-Temperature Growth of Well-Aligned ZnO Nanorods by Chemical Vapor Deposition. Adv. Mater. 2002, 14, 215-218.
13. Choy, J. H.; Jang, E. S.; Won, J. H.; Chung, J. H.; Jan, D. J.; Kim, Y. W. Soft Solution Route to Directionally Grown ZnO Nanorod Arrays on Si Wafer; Room-Temperature Ultraviolet Laser. Adv. Mater. 2003, 15, 1911-1914.
14. Tarn, K. H.; Cheung, C. K.; Leung, Y. H.; Djurii, A. B.; Ling, C. C.; Beling, C. D.; Fung, S.; Kwok, W. M.; Chan, W. K.; Phillips, D. L.; et al. Defects in ZnO Nanorods Prepared by a Hydrothermal Method. J. Phys. Chem. B 2006, 110, 20865-20871.
15. Fan, H. J.; Fleischer, F.; Lee, W.; Nielsch, K.; Scholz, R.; Zacharias, M.; Gösele, U.; Dadgar, A.; Krost, A. Patterned Growth of Aligned ZnO Nanowire Arrays on Sapphire and GaN layers. Superlattices Microstruct. 2004, 36, 95-105.
16. Ng, H. T.; Han, J.; Yamada, T.; Nguyen, P.; Chen, Y. P.; Meyyappan, M. Single Crystal Nanowire Vertical Surround-Gate Field-Effect Transistor. Nano Lett. 2004, 4, 1247-1252.
17. Yan, Y; Chan-Park, M. B.; Zhang, Q. Advances in Carbon-Nanotube Assembly. Small 2006, 3, 24-42.
18. Djurisic, A. B.; Leung, Y. H. Optical Properties of ZnO Nanostructures. Small 2006, 2, 944-961.
19. Vanheusden, K.; Warren, W. L.; Seager, C. H.; Tallant, D. R.; Voigt, J. A.; Gnade, B. E. Mechanisms Behind Green Photoluminescence in ZnO Phosphor Powders. J. Appl. Phys. 1996, 79, 7983-7990.
20. Dingle, R. Luminescent Transitions Associated With Divalent Copper Impurities and the Green Emission from Semiconducting Zinc Oxide. Phys. Rev. Lett. 1969, 23, 579-581.
21. w was calculated by normalizing the reflectance spectra with the internal quantum efficiency spectra of a typical multicrystalline Si solar cell and the terrestrial global solar spectrum (AM1.5). For detailed calculation process, please refer to ref 6. Absolute hemispherical reflectance measurements were carried out with a UV-vis spectrophotometer (Lambda 20) and an integrating sphere (Labsphere) with a sampling spot of 10 mm × 10 mm at normal incidence.
22. Lee, C.; Bae, S. Y.; Mobasser, S.; Manohara, H. A Novel Silicon Nanotips Antireflection Surface for the Micro Sun Sensor. Nano Lett. 2005, 5, 2438-2442.
23. Li, Y.; Lee, E. J.; Cai, W. P.; Kim, K. Y.; Sung, O. C. Unconventional Method for Morphology-Controlled Carbonaceous Nanoarrays Based on Electron Irradiation of a Polystyrene Colloidal Monolayer. ACS Nano 2008, 2, 1108-1112.
24. Park, B. Y.; Taherabadi, L.; Wang, C.; Zoval, J.; Madou, M. J. Electrical Properties and Shrinkage of Carbonized Photoresist Films and the Implications for Carbon Microelectromechanical Systems Devices in Conductive Media. J. Electro.Chem. Soc. 2005, 152, J136-J143.
25. Takashi, K.; Toshiki, M.; Akira, T. Formation of a Flexible Graphite Film from Poly(acrylonitrile) Using a Layered Clay Film as Template. Chem. Mater. 1994, 6, 2138-2142.
26. Miao, J. Y.; Cai, Y.; Chan, Y. F.; Sheng, P.; Wang, N. A Novel Carbon Nanotube Structure Formed in Ultra-Long Nanochannels of Anodic Aluminum Oxide Templates. J. Phys. Chem. B 2006, 110, 2080-2083.
27. Yao, B. D.; Chan, Y. F.; Wang, N. Formation of ZnO Nanostructures by a Simple Way of Thermal Evaporation. Appl. Phys. Lett. 2002, 81, 757-759.
28. Sun, Y.; Fuge, G. M.; Ashfold, M. N. R. Growth of Aligned ZnO Nanorod Arrays by Catalyst-Free Pulsed Laser Deposition Methods. Chem. Phys. Lett. 2004, 396, 21-26.
29. Wei, Y.; Ding, Y.; Li, C.; Xu, S.; Ryo, J.; Dupuis, R.; Sood, A. K.; Polla, D. L.; Wang, Z. L Growth of Vertically Aligned ZnO Nanobelt Arrays on GaN Substrate. J. Phys. Chem. C, in press.
30. Claeyssens, F.; Freeman, C. L.; Allan, N. L.; Sun, Y.; Ashfold, M. N. R.; Harding, J. H. Growth of ZnO Thin Films-Experiment and Theory. J. Mater. Chem. 2005, 15, 139-148.
31. Tusche, C.; Meyerheim, H. L.; Kirschner, J. Obervation of Depolarized ZnO (0001) Monolayers: Formation of Unreconstructed Planar Sheets. Phys. Rev. Lett. 2007, 99, 026102-1-026102-4.
32. Weng, X. L.; Tang, W.; Wu, Y. T.; Deng, L. J. Microstructure and Resistivity of Low Temperature Deposition ITO Films on PET Substrate by Magnetron Sputtering. Key Eng. Mater. 2007, 353, 1867-1870.
33. Wang, X. D.; Neff, C.; Graugnard, E.; Ding, Y.; King, J. S.; Pranger, L. A.; Tannenbaum, R.; Wang, Z. L.; Summers, C. J. Photonic Crystals Fabricated Using Patterned Nanorod Arrays. Adv. Mater. 2005, 17, 2103-2106.
34. Wang, X. D.; Summers, C. J.; Wang, Z. L. Large-Scale Hexagonal-Patterned Growth of Aligned ZnO Nanorods for Nano-Optoelectronics and Nanosensor Arrays. Nano Lett. 2004, 4, 423-426.
35. Cole, J. J.; Wang, X.; Knuesel, R. J.; Jacobs, H. O. Integration of ZnO Microcrystals with Tailored Dimensions Forming Light Emitting Diodes and UV Photovoltaic Cells. Wono Lett. 2008, 8, 1477-1481.