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Volumn 41, Issue 5, 2009, Pages 833-837
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Ion-implantation-induced patterns formation on silicon substrates
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Author keywords
Carbon nanotubes; CVD; Ion implantation; Patterns
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
ION BOMBARDMENT;
ION IMPLANTATION;
NONMETALS;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR GROWTH;
SUBSTRATES;
SURFACE DEFECTS;
XENON;
CVD;
GROWTH BEHAVIORS;
NANOMETER-SCALE PATTERNS;
PATTERNS;
SEMICONDUCTOR INDUSTRIES;
SILICON SUBSTRATES;
SIMPLE METHODS;
SURFACE SPUTTERING;
XENON IONS;
CARBON NANOTUBES;
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EID: 61649103494
PISSN: 13869477
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physe.2009.01.002 Document Type: Article |
Times cited : (11)
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References (19)
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