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Volumn 41, Issue 5, 2009, Pages 833-837

Ion-implantation-induced patterns formation on silicon substrates

Author keywords

Carbon nanotubes; CVD; Ion implantation; Patterns

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ION BOMBARDMENT; ION IMPLANTATION; NONMETALS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR GROWTH; SUBSTRATES; SURFACE DEFECTS; XENON;

EID: 61649103494     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2009.01.002     Document Type: Article
Times cited : (11)

References (19)
  • 3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.