System identification of a novel 6-DOF precision positioning table

Sensors and Actuators, A: Physical

Volumn 150, Issue 2, 2009, Pages 286-295

  Fung, Rong Fong ^a   Lin, Wang Chi ^a  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

6 DOF precision positioning table; Bouc Wen model; Cross coupling effect; Real coded genetic algorithm; System identification

Indexed keywords

GENETIC ALGORITHMS; HYSTERESIS; PIEZOELECTRIC ACTUATORS; VIBRATIONS (MECHANICAL);

6-DOF PRECISION POSITIONING TABLE; BOUC-WEN MODEL; CROSS-COUPLING EFFECT; REAL-CODED GENETIC ALGORITHM; SYSTEM IDENTIFICATION;

IDENTIFICATION (CONTROL SYSTEMS);

EID: 61449131338     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.01.007     Document Type: Article

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