Design and control of a 6-DOF high-precision integrated positioner

Proceedings of the American Control Conference

Volumn 3, Issue , 2004, Pages 2493-2498

  Kim, Won Jong ^a   Hu, Tiejun ^a   Bhat, Nikhil D ^a,b  

^a Texas AandM University   (United States)

^b Pathway Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL SYSTEM ANALYSIS; DEGREES OF FREEDOM (MECHANICS); DIGITAL SIGNAL PROCESSING; FEEDBACK; GRAVITATIONAL EFFECTS; LINEAR MOTORS; MAGNETIC LEVITATION; PERMANENT MAGNETS; SEMICONDUCTOR DEVICE MANUFACTURE;

LEVITATION MOTORS; MULTIDIMENSIONAL POSITIONERS;

POSITION CONTROL;

EID: 8744232904     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

1. G. van Engelen and A. G. Bouwer, "Two-step positioning device using Lorentz forces and a static gas bearing," U.S. Patent No. 5 120 034, June 1992.
2. S. Sakino, E. Osanai, M. Negishi, M. Horikoshi, M. Inoue, and K. Ono, "Movement guiding mechanism," U.S. Patent No. 5 040 431, August 1991.
3. S. Wittekoek and A. G. Bouwer, "Displacement device, particularly for the photolithographic treament of a substrate," U.S. Patent No. 4 655 594, April 1987.
4. B. A. Sawyer, "Magnetic positioning device," U.S. Patent No. 3 376 578, April 1987.
5. W. E. Hinds and B. Nocito, "The Sawyer linear motor," Proceedings of The Second Symposium on Incremental Motion Control Systems and Devices, pp. W-l-W-10, 1973.
6. E. R. Pelta, "Two Axis Sawyer Motor," Proceedings of the 12th Annual IEEE Industrial Electronics Society Conference, pp. 3-8, 1986.
7. T. Asakawa, "Two dimensional precise positioning devices for use in a semiconductor apparatus," U.S. Patent No. 4 535 278, August 1985.
8. D. Ebihara and M. Watada, "Study of a basic structure of surface actuator," IEEE Transactions on Magnetics, vol. 25, no. 5, pp. 3916-3918, 1989.
9. J. D. Buckley and D. N. Galburt, and C. Karatzas, "Step-and-scan lithography using reduction optics," Journal of Vacuum Science and Technology, B, vol. 7, no. 6, pp. 1607-1612, 1989.
10. W.-J. Kim and D. L. Trumper, "Force ripple in surface-wound permanent- magnet linear motors," Proc. IEEE Int. Magnetics Conf., FE-03, April 1996.
11. K. Halbach, "Design of permanent multipole magnets with oriented rare earch cobalt material." Nucl. Instrum. Methods, vol. 169, no. 1, pp. 1-10, 1980.
12. D. L. Trumper, W.-J. Kim, and M. E. Williams, "Design and analysis framework for permanent-magnet machines," IEEE Transactions on Industry Applications, vol. 32, no. 2, pp. 371-379, March/April 1996.
13. D. L. Trumper, W.-J. Kim, and M. E. Williams, "Magnetic arrays," U.S. Patent Office, Patent No. 5 631 618, May 1997.
14. W.-J. Kim, High-precision Planar Magnetic Levitation, Doctoral Thesis, Massachusetts Institute of Technology, June 1997.