Error compensation and feedforward controller design for A 6-dof micro-positioning platform

2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS

Volumn , Issue , 2005, Pages 942-947

  Ting, Yung ^a   Jar, Ho Chin ^a   Li, Chun Chung ^a  

^a CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

Author keywords

6 dof platform; Error compensation; Hysteresis modeling; Piezoelectric actuators

Indexed keywords

CONTROLLERS; ERROR COMPENSATION; FEEDFORWARD CONTROL; HYSTERESIS; INTELLIGENT ROBOTS; INVERSE PROBLEMS; PIEZOELECTRICITY;

6-DOF PLATFORM; ACCURACY OF POSITIONING; ERROR COMPENSATION METHODS; FEED-FORWARD CONTROLLERS; HYSTERESIS CONTROLLER; HYSTERESIS MODELING; MICRO POSITIONING PLATFORM; NONLINEAR HYSTERESIS;

PIEZOELECTRIC ACTUATORS;

EID: 33751313001     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IROS.2005.1545073     Document Type: Conference Paper

References (13)

1. Wang S. M., Liu, Y. L., and Kang, Y., "An Efficient Error Compensation System for CNC Multi-axis Machines," Int. J. of Machine Tools & Manufacture, 42, pp. 1235-1245, 2002. (Pubitemid 35011231)
2. Wang, S. M., and Ehmann, K. F., "Measurement Methods for the Position Errors of a Multi-axis Machine. Part 1: Principles and sensitivity analysis," Int. J. of Machine Tools & Manufacture, 39, pp. 951-964, 1999.
3. Wang, S. M., and Ehmann, K. F., "Error model and accuracy analysis of a six-DOF Stewart Platform," Int. J. of Manufacturing Science & Engineering, Transaction of ASME, 124(2), pp. 286-295, 2002. (Pubitemid 35202617)
4. Lin, P. D. and, Chen, J. F, "Analysis of Errors in Precision for Closed Loop Mechanisms," J. of Mechanical Design, 116, pp. 197-203, 1994.
5. Chen, C. H., "Analysis and Measurement of Nano-Positioning Stage for Optimum Displacement Resolution and X-Y Axis Tracking Circle," Master Thesis, National Taiwan University, 2003.
6. Hughes, D. and Wen, J. T., "Preisach modeling of piezoceramic and shape memory alloy hysteresis", Smart Materials and Structures, 6, pp. 287-300, 1997. (Pubitemid 127631523)
7. Ge, P. and Jouaneh, M., "Modeling hysteresis in piezoceramic actuators", Precision Engineering, 17, pp. 211-221, 1995.
8. Ge, P. and Jouaneh, M., "Generalized preisach model for hysteresis nonlinearity of piezoceramic actuators", Precision Engineering, 20, pp. 99-111, 1997. (Pubitemid 127430363)
9. Yu, Y., Naganathan, N., and Dukkipati, R. V., "Preisach modeling of hysteresis for piezoceramic actuator system", Mechanism and Machine Theory, 37, pp. 49-59, 2002. (Pubitemid 33147622)
10. Nguyen, C. C., Antrazi, S. S., Xhou, X.-L., and Campbell, C. E., "Adaptive Control of a Stewart Platform-Based Manipulator", Journal of Robotic Systems, 10(5), pp. 657-687, July 1993.
11. Ting, Y., Chen, Y. S., and Jar, H. C., "Modeling and Control for a Gough- Stewart Platform CNC Machine", Journal of Robotic Systems, 21(11), pp. 609-623, 2004.
12. Ge, P., and Jouaneh, M., "Tracking control of a piezoelectric actuator," IEEE Transactions on control systems technology, 4(3), pp. 209-216, 1996.
13. Chuang, C. H., "Investigation on the Static Error of 6-DOF Micropositioning Platform," Master Thesis, Chung Yuan Christian University, 2004.