Laser ablation and structuring of transparent materials with ultrashort laser pulses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3343, Issue , 1998, Pages 400-410

  Ashkenasi, David ^a   Herbst, Gerril ^b   Rosenfeld, Arkadi ^a   Varel, H ^a   Lorenz, Michael ^a   Stoian, Razvan ^a,d   Campbell, Eleanor E B ^a,b,c  

^a MAX BORN INSTITUT   (Germany)

^b Fimea GmbH   (Germany)

^c UNIVERSITY OF GOTHENBURG   (Sweden)

^d NATIONAL INSTITUTE FOR LASER   (Romania)

Author keywords

Channels; Micro holes; Micro structuring; Periodic patterns; Self focusing; Three dimensional bulk objects; Transparent materials; Ultrashort laser pulses

Indexed keywords

ABLATION; ASPECT RATIO; FLUORINE COMPOUNDS; HIGH POWER LASERS; LASER ABLATION; ULTRASHORT PULSES;

CHANNELS; MICRO HOLES; MICRO STRUCTURING; PERIODIC PATTERN; SELF-FOCUSING; TRANSPARENT MATERIAL;

LASER MATERIALS PROCESSING;

EID: 61349195092     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.321575     Document Type: Conference Paper

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