Optical properties of titanium oxycarbide thin films

Applied Surface Science

Volumn 255, Issue 10, 2009, Pages 5615-5619

  Marques, L ^a   Pinto, H M ^a   Fernandes, A C ^a   Banakh, O ^b   Vaz, F ^c   Ramos, M M D ^a  

^a UNIVERSITY OF MINHO   (Portugal)

^b Ecole d'Ingenieurs de l'Arc Jurassien   (Switzerland)

^c NONE

Author keywords

Density functional theory; Ellipsometry; Magnetron sputtering; Optical properties; Titanium oxycarbide

Indexed keywords

CALCULATIONS; DENSITY FUNCTIONAL THEORY; ELLIPSOMETRY; MAGNETRON SPUTTERING; OPTICAL CONDUCTIVITY; OPTICAL PROPERTIES; OXYGEN; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS; TITANIUM COMPOUNDS;

CLASSICAL DRUDE THEORY; DAMPING CONSTANTS; DIELECTRIC FUNCTIONS; FILM STOICHIOMETRY; FIRST-PRINCIPLES CALCULATION; INTRABAND TRANSITIONS; REACTIVE DC MAGNETRON SPUTTERING; TITANIUM OXYCARBIDE;

OPTICAL FILMS;

EID: 61349180129     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.08.022     Document Type: Article

References (20)

1. Yao J., Shao J., He H., and Fan Z. Vacuum 81 (2007) 1023
2. Santhenam A.T. Application of transition metal carbides and nitrides in industrial tools. In: Oyama S.T. (Ed). The Chemistry of Transition Metal Carbides and Nitrides (1996), Blackie Academic and Professional, London 28-52
3. Bally A.R., Hones P., Sanjinés R., Schmid P.E., and Lévy F. Surf. Coat. Technol. 108 (1998) 166
4. Fernandes A.C., Carvalho P., Vaz F., Lanceros-Méndez S., Machado A.V., Parreira N.M.G., Pierson J.F., and Martin N. Thin Solid Films 515 (2006) 866
5. Marques L.S., Fernandes A.C., Vaz F., and Ramos M.M.D. Plasma Process. Polym. 4 (2007) S195
6. Hohenberg P., and Kohn W. Phys. Rev. 136 (1964) 864
7. Blochl P.E. Phys. Rev. B 50 (1994) 953
8. Kresse G., and Furthmuller J. Comput. Math. Sci. 6 (1996) 15
9. Kresse G., and Furthmuller J. Phys. Rev. 54 (1996) 11169
10. Kresse G., and Hafner J. Phys. Rev. B 47 (1997) 558
11. Perdew, and Zunger. Phys. Rev. B 23 (1982) 5048
12. Monkhorst J.H., and Pack J. Phys. Rev. B 13 (1976) 5188
13. Kittel C. Introduction to Solid State Physics (1996), Wiley, New York p. 292
14. Elliott S. The Physics and Chemistry of Solids (1998), Wiley, New York p. 379
15. Schmid P.E., Sunaga M.S., and Lévy F. J. Vac. Sci. Technol. A 16 (1998) 2870
16. Leung C., Weinert M., Allen P.B., and Wentzcovitch R. Phys. Rev. B 54 (1996) 7857
17. Thèye M. Phys. Rev. B 2 (1970) 3060
18. Alward J.F., Fong C.Y., El-Batanouny M., and Wooten F. Phys. Rev. B 12 (1975) 1105
19. Izquierdo J., Vega A., Bouarab S., and Khan M.A. Phys. Rev. B 58 (1998) 3507
20. Delin A., Eriksson O., Ahuja R., et al. Phys. Rev. B 54 (1996) 1673