Influence of oxygen addition on the structural and elastic properties of TiC thin films

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Marques, Luís S A ^a   Fernandes, Ana C ^a   Vaz, Filipe ^a   Ramos, Marta M D ^a  

^a UNIVERSITY OF MINHO   (Portugal)

Author keywords

Density functional theory (DFT); Elastic constants; Structure; Thin films; Titanium oxycarbide

Indexed keywords

CALCULATED VALUES; COHESIVE ENERGIES; DENSITY FUNCTIONAL THEORY (DFT); DENSITY OF STATE; ELASTIC PROPERTIES; EXCHANGE-CORRELATION FUNCTIONALS; FIRST-PRINCIPLES CALCULATION; GENERALIZED GRADIENT APPROXIMATIONS; INFLUENCE OF OXYGEN; LATTICE PARAMETERS; OXYGEN CONTENT; PSEUDOPOTENTIAL METHOD; STRUCTURE; THEORETICAL RESULT;

ELASTIC CONSTANTS; ELASTIC MODULI; LATTICE CONSTANTS; MECHANICAL PROPERTIES; OXYGEN; PROBABILITY DENSITY FUNCTION; TEMPERATURE INDICATING CAMERAS; THIN FILMS; TITANIUM; TITANIUM CARBIDE;

DENSITY FUNCTIONAL THEORY;

EID: 47349115125     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200730610     Document Type: Conference Paper

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