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Volumn 267, Issue 4, 2009, Pages 615-619
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Alkali ion scattering from Ag(0 0 1) and Ag thin films at low and hyperthermal energies
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Author keywords
Hot carriers; Hyperthermal energy; Ion beam effects; Ion scattering; Ion surface impact; Semiconductor device measurement
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Indexed keywords
ATOMIC SPECTROSCOPY;
ATOMS;
CESIUM;
CRYSTAL STRUCTURE;
DYNAMICS;
ELECTRIC CONDUCTIVITY;
ELECTRON ENERGY LOSS SPECTROSCOPY;
ELECTRON SCATTERING;
ENERGY DISSIPATION;
HOT CARRIERS;
ION BEAMS;
MOLECULAR DYNAMICS;
MOSFET DEVICES;
PLASMA INTERACTIONS;
SCHOTTKY BARRIER DIODES;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DIODES;
SEMICONDUCTOR MATERIALS;
SEMICONDUCTOR SWITCHES;
SILICON WAFERS;
SILVER;
SINGLE CRYSTAL SURFACES;
SPUTTERING;
HYPERTHERMAL ENERGY;
ION BEAM EFFECTS;
ION SCATTERING;
ION-SURFACE IMPACT;
SEMICONDUCTOR DEVICE MEASUREMENT;
IONS;
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EID: 61349113320
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2008.11.037 Document Type: Article |
Times cited : (3)
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References (32)
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