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Volumn 48, Issue 2, 2009, Pages
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Soft X-ray microscope constructed with 130-nm spatial resolution using a high harmonic X-ray source
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRON SOURCES;
HARMONIC ANALYSIS;
HYDROGEN;
IMAGE RESOLUTION;
LIGHT;
LIGHT SOURCES;
MULTILAYERS;
NEON;
PULSED LASER APPLICATIONS;
ULTRASHORT PULSES;
X RAY MICROSCOPES;
CHARGE-COUPLED DEVICES;
CONCAVE MIRRORS;
FRESNEL ZONE PLATES;
HIGH HARMONICS;
HIGH-ORDER HARMONICS;
HYDROGEN SILSESQUIOXANE;
INTENSE FEMTOSECOND LASER PULSE;
LASER CHIRPS;
MICROSCOPE OBJECTIVES;
MO/SI MULTILAYERS;
NANO-METER SCALE;
NEON ATOMS;
SOFT X-RAY SOURCES;
SOFT X-RAYS;
SPATIAL RESOLUTIONS;
X-RAY LIGHT SOURCES;
X-RAY SOURCES;
X RAYS;
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EID: 60849125734
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.48.026506 Document Type: Article |
Times cited : (11)
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References (14)
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