Micromachining of microchannel on the polycarbonate substrate with CO2 laser direct-writing ablation

Optics and Lasers in Engineering

Volumn 47, Issue 5, 2009, Pages 594-598

  Qi, Heng ^a,b   Chen, Tao ^a,b   Yao, Liying ^a,b   Zuo, Tiechuan ^a,b  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

^b National Center of Laser Technology   (China)

Author keywords

CO2 laser; Direct writing ablation; Microchannel; Micromachining; Polycarbonate

Indexed keywords

ABLATION; ASPECT RATIO; COMPOSITE MICROMECHANICS; LASER BEAMS; LASERS; MICROMACHINING; PLASTIC PRODUCTS; PULSED LASER DEPOSITION; VELOCITY;

BONDING TECHNIQUES; CO2 LASER; DIRECT-WRITING ABLATION; LASER DIRECT WRITINGS; LASER POWER; LOW-POWER; MICROCHANNEL; MICROMACHINE; MOLTEN POOLS; MOVING VELOCITIES; POLYCARBONATE SUBSTRATES; PROCESS PARAMETERS; STEADY STATE;

MICROCHANNELS;

EID: 60849093167     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2008.09.004     Document Type: Article

References (19)

1. Kopp M.U., de Mello A.J., and Manz A. Chemical amplification: continuous-flow PCR on a chip. Science 280 (1998) 1046-1048
2. Obeid P.J., Christopoulos T.K., Crabtree H.J., and Backhouse C.J. Microfabricated device for DNA and RNA amplification by continuous-flow polymerase chain reaction and reverse transcription-polymerase chain reaction with cycle number selection. Anal Chem 75 (2003) 288-295
3. Schneegaß I., Bräutigam R., and Köhler J.M. Miniaturized flow-through PCR with different template types in a silicon chip thermocycler. Lab Chip 1 (2001) 42-49
4. Mullis K.B., Ferré E., and Gibbs R.A. The polymerase chain reaction (1994), Birkhäuser, Boston
5. Lee G.B., Chen S.H., Huang G.R., Sung W.C., and Lin Y.H. Microfabricated plastic chips by hot embossing methods and their application for DNA separation and detection. Sensor Actuat B 75 (2001) 142-148
6. Sun Y., Kwok Y.C., and Nguyen N.T. A circular ferrofluid driven microchip for rapid polymerase chain reaction. Lab Chip 7 (2007) 1012-1017
7. Schneegaß I., and Köhler J.M. Flow-through polymerase chain reactions in chip thermocyclers. Rev Mol Biotechnol 82 (2001) 101-121
8. Sun Y., Satyanarayan M.V.D., Nguyen N.T., and Kwok Y.C. Continuous flow polymerase chain reaction using a hybrid PMMA-PC microchip with improved heat tolerance. Sensor Actuat B 130 (2008) 836-841
9. http://www.goodfellow.com/csp/active/static/A/polycarbonate.html
10. Gärtner C, Klemm R, Becker H. Methods and instruments for continuous-flow PCR on a chip. in: Proc. SPIE. Microfluidics, BioMEMS, and Medical Microsystems V, San Jose, USA, January 22, 2007, p. 1-8.
11. Hashimoto M., Chen P.C., Mitchell M.W., Nikitopoulos D.E., Soperb S.A., and Murphy M.C. Rapid PCR in a continuous flow device. Lab Chip 4 (2004) 638-645
12. Devalckenaere M., Jadin A., Kolev K., and Laude L.D. Excimer laser ablation of polycarbonate-based plastic substrates. Nucl Instrum Methods B 151 (1999) 263-267
13. Zhao Z.Y., Hou D.S., Dong X.C., and DU C.L. Research on etching properties of polycarbonate by KrF excimer laser. Opto-Electro Eng 31 (2004) 4-7
14. 2 laser system. J Micromech Microeng 14 (2004) 182-189
15. Craciun V., Bassim N., Singh R.K., Craciun D., Hermann J., and Boulmer-Leborgne C. Laser-induced explosive boiling during nanosecond laser ablation of silicon. Appl Surf Sci 186 (2002) 288-292
16. Baudach S., Bonse J., Krüger J., and Kautek W. Ultrashort pulse laser ablation of polycarbonate and polymethylethacrylate. Appl Surf Sci 154-155 (2000) 555-560
17. 2 laser ablation. J Appl Phys 101 (2007) 024901
18. Chen T.C., and Darling R.B. Laser micromachining of the materials using in microfluidics by high precision pulsed near and mid-ultraviolet Nd:YAG lasers. J Mater Process Technol 193 (2007) 248-253
19. Erickson K.L. Thermal decomposition mechanisms common to polyurethane, epoxy, poly (diallyl phthalate), polycarbonate and poly (phenylene sulfide). J Therm Anal Calorim 89 (2007) 427-440