Research on etching properties of polycarbonate by KrF excimer laser

Guangdian Gongcheng/Opto-Electronic Engineering

Volumn 31, Issue 2, 2004, Pages 4-7

  Zhao, Ze Yu ^a   Hou, De Sheng ^a   Dong, Xiao Chun ^a   Du, Chun Lei ^a  

^a INSTITUTE OF OPTICS AND ELECTRONICS   (China)

Author keywords

Excimer lithography; Laser ablation; Polycarbonate

Indexed keywords

EID: 3042817174     PISSN: 1003501X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)