Dual-frequency paired polarization phase shifting ellipsometer

Optics Communications

Volumn 282, Issue 8, 2009, Pages 1516-1520

  Yu, Chih Jen ^a   Lin, Chu En ^a   Teng, Hui Kang ^b   Tsai, Chien Chung ^c   Chou, Chien ^a,d,e  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b NAN KAI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^d NATIONAL YANG MING UNIVERSITY   (Taiwan)

^e CHANG GUNG UNIVERSITY   (Taiwan)

Author keywords

Dual frequency laser; Ellipsometry; Optical heterodyne interferometer; Phase shifting technique

Indexed keywords

BEAMFORMING; ERROR ANALYSIS; HETERODYNING; INTERFEROMETERS; INTERFEROMETRY; LASER BEAMS; LASERS; PHASE SHIFT; POLARIZATION;

COMMON PATHS; DUAL FREQUENCIES; DUAL-FREQUENCY LASER; DYNAMIC RANGES; ELLIPSOMETER; ELLIPSOMETRIC PARAMETERS; ENVIRONMENTAL DISTURBANCES; LASER FREQUENCIES; LINEARLY-POLARIZED LASERS; NOISE REJECTIONS; OPTICAL HETERODYNE INTERFEROMETER; PHASE SHIFTING TECHNIQUE; PHASE-SHIFTING INTERFEROMETERS; POLARIZATION PHASE;

ELLIPSOMETRY;

EID: 60749129146     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2009.01.001     Document Type: Article

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