Balanced detector interferometric ellipsometer

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 23, Issue 11, 2006, Pages 2871-2879

  Chou, Chien ^a   Teng, Hui Kang ^b   Tsai, Chien Chung ^a   Yu, Li Ping ^a  

^a NATIONAL YANG MING UNIVERSITY   (Taiwan)

^b NAN KAI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETERS; LASER BEAM EFFECTS; LIGHT POLARIZATION; PHASE MEASUREMENT; PHOTODETECTORS; THIN FILMS;

AMPLITUDE-SENSITIVE METHOD; BALANCED DETECTOR INTERFEROMETRIC ELLIPSOMETER; OPTICAL HETERODYNE INTERFEROMETER;

ELLIPSOMETRY;

EID: 33845562435     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.23.002871     Document Type: Article

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