Optimization techniques for the estimation of the thickness and the optical parameters of thin films using reflectance data

Journal of Applied Physics

Volumn 97, Issue 4, 2005, Pages

  Ventura, S D ^a   Birgin, E G ^b   Martinez J M ^a   Chambouleyron, I ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

^b UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

FUNCTIONAL FORM MINIMIZATION (FFM); LARGE-SCALE MINIMIZATION METHOD; OPTICAL CONSTANTS; PHOTON ENERGY;

ALGEBRA; ALGORITHMS; DIELECTRIC MATERIALS; ERROR ANALYSIS; INVERSE PROBLEMS; OPTICAL COATINGS; OPTIMIZATION; PHOTOMETRY; PHOTONS; REFLECTION; SEMICONDUCTING FILMS; SET THEORY;

THIN FILMS;

EID: 13744259356     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1849431     Document Type: Article

References (21)

1. I. Chambouleyron and J. M. Martínez, in Handbook of Thin Films Materials, edited by H. S. Nalwa (Academic, San Diego, 2001), Vol. 3, Chap. 12, pp. 593-622.
2. I. Chambouleyron, J. M. Martínez, A. C. Moretti, and M. Mulato, Appl. Opt. 36, 8238 (1997).
3. E. G. Birgin, I. Chambouleyron, and J. M. Martínez, J. Comput. Phys. 151, 862 (1999).
4. M. Mulato, I. Chambouleyron, E. G. Birgin, and J. M. Martínez, Appl. Phys. Lett. 77, 2133 (2000).
5. www.ime.unicamp.br/~puma
6. I. Chambouleyron, S. Ventura, E. G. Birgin, and J. M. Martínez, J. Appl. Phys. 92, 3093 (2002).
7. E. G. Birgin, I. Chambouleyron, J. M. Martínez, and S. Ventura, Appl. Numer. Math. 47, 109 (2003).
8. M. Raydan, SIAM J. Optim. 7, 26 (1997).
9. R. Swanepoel, J. Phys. E 16, 1214 (1983).
10. M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, UK, 1993).
11. O. S. Heavens, Optical Properties of Thin Solid Films (Dover, New York, 1991).
12. R. D. Bringans, J. Phys. D 10, 1855 (1977).
13. R. E. Denton, R. D. Campbell, and S. G. Tomlin, J. Phys. D 5, 852 (1972).
14. G. Hass and R. E. Thun, in Physics of Thin Films (Academic, New York, 1969).
15. P. O. Nilsson, Appl. Opt. 7, 435 (1968).
16. C. Reale, Thin Solid Films 9, 395 (1972).
17. Y. Hishikawa, N. Nakamura, S. Tsuda, S. Nakano, Y. Kishi, and Y. Kuwano, Jpn. J. Appl. Phys., Part 1 30, 1008 (1991).
18. www.wolfram.com
19. D. Poelman and P. F. Smet, J. Phys. D 36, 1850 (2003).
20. The measured T and R spectral data contain four digits.
21. T. C. Paulick, Appl. Opt 25, 562 (1986).