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Applied Physics Letters

Volumn 94, Issue 7, 2009, Pages

70 nm resolution in subsurface optical imaging of silicon integrated-circuits using pupil-function engineering

(3) Serrels, K A a Ramsay, E a Reid, D T a

a HERIOT WATT UNIVERSITY (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MULTIPHOTON PROCESSES; POSITION CONTROL;

1550 NM; ANNULAR PUPILS; DEPTH OF FOCUS; ENHANCING EFFECTS; EXPERIMENTAL EVIDENCES; FOCAL SPOTS; IMAGING PROCESS; NM RESOLUTIONS; NON-LINEAR IMAGING; OPTICAL BEAM-INDUCED CURRENTS; OPTICAL IMAGING; PLANE APERTURES; TWO PHOTONS;

OPTICAL MICROSCOPY;

EID: 60749111864 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3081108 Document Type: Article

Times cited : (25)

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