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Volumn 179, Issue 1, 2000, Pages 1-7

Focusing light to a tighter spot

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; DIFFRACTION; FOCUSING; LENSES; LIGHT POLARIZATION; PHOTOSENSITIVITY;

EID: 0033683475     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(99)00729-4     Document Type: Article
Times cited : (819)

References (24)
  • 11
    • 0004668177 scopus 로고
    • Wavefront engineering for photolithography
    • July
    • M.D. Levenson, Wavefront engineering for photolithography, Physics Today, July, 28 (1993).
    • (1993) Physics Today , vol.28
    • Levenson, M.D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.