Growth stress in tungsten carbide-diamond-like carbon coatings

Journal of Applied Physics

Volumn 105, Issue 3, 2009, Pages

  Pujada, B R ^a,b,e   Tichelaar, F D ^c   Arnoldbik, W M ^d   Sloof, W G ^b   Janssen, G C A M ^b  

^a MATERIALS INNOVATION INSTITUTE M2I   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^d UTRECHT UNIVERSITY   (Netherlands)

^e CENTRO BRASILEIRO DE PESQUISAS FÍSICAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; AMORPHOUS MATERIALS; ARGON; COATINGS; COMPRESSIVE STRESS; DIAMONDS; GROWTH (MATERIALS); INERT GASES; ION BOMBARDMENT; IONS; LIGHTING; MICROSTRUCTURE; OPTICAL SENSORS; PARTIAL PRESSURE; PLASMAS; POSITIVE IONS; PROBABILITY DENSITY FUNCTION; SPACE PROBES; TENSILE STRESS; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN; TUNGSTEN CARBIDE;

ABRUPT CHANGES; DIAMOND-LIKE CARBON COATINGS; ELASTIC RECOIL DETECTION ANALYSIS; ELECTRON PROBE MICRO ANALYZERS; ENERGY ANALYZERS; ENERGY DISTRIBUTION FUNCTIONS; GROWTH STRESS; POLY-CRYSTALLINE; STRESS DECREASE; TEM; TRANSMISSION ELECTRONS; WAFER CURVATURES;

DISTRIBUTION FUNCTIONS;

EID: 60449105931     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3073890     Document Type: Article

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