Damage mechanisms in thin film solar cells during sputtering deposition of transparent conductive coatings

Journal of Applied Physics

Volumn 105, Issue 3, 2009, Pages

  Fan, Qi Hua ^a   Deng, Michael ^b   Liao, Xianbo ^a   Deng, Xunming ^a,b  

^a UNIVERSITY OF TOLEDO   (United States)

^b Xunlight Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ELECTRIC DISCHARGES; ENERGY CONVERSION; PHOTOVOLTAIC CELLS; SEMICONDUCTING SILICON COMPOUNDS; SOLAR CELLS; SOLAR EQUIPMENT; STAINLESS STEEL; THIN FILM DEVICES; THIN FILMS;

AMORPHOUS SILICON (A-SI); CELL PROCESS; DAMAGE MECHANISMS; DIRECT CURRENT SPUTTERING; ENERGY CONVERSION DEVICES; HIGHER YIELDS; PLASMA DISCHARGES; RADIO-FREQUENCY SPUTTERING; REVERSE BIAS; SPUTTERING DEPOSITIONS; SPUTTERING PROCESS; STAINLESS STEEL SUBSTRATES; THIN FILM SOLAR CELLS; TRANSPARENT CONDUCTIVE; TRANSPARENT CONDUCTIVE OXIDES;

SOLAR ENERGY;

EID: 60449095981     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3074328     Document Type: Article

References (7)

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2. See, for example, http://www.xunlight.com.
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