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Volumn 5, Issue 4, 2004, Pages 422-427

Fabrication of meso-porous silica film by sol-gel of TEOS

Author keywords

Porous silica film; Sol gel technique; Tetraethyl orthosilicate (TEOS); Thermal conductivity

Indexed keywords

FABRICATION; GLYCEROL; MESOPOROUS MATERIALS; MORPHOLOGY; POROUS MATERIALS; SILICATES; SOL-GELS; THERMAL CONDUCTIVITY; THIN FILMS;

EID: 6044238103     PISSN: 10093095     EISSN: None     Source Type: Journal    
DOI: 10.1631/jzus.2004.0422     Document Type: Article
Times cited : (9)

References (12)
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  • 2
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  • 3
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    • Gill, I., Ballesteros, A., 1998. Encapsulation of biologicals within silicate, siloxane, and hybrid sol-gel polymers: An efficient and generic approach. J. Am. Chem. Soc., 120:8587-8592.
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    • Gill, I.1    Ballesteros, A.2
  • 4
    • 36448998728 scopus 로고
    • Effect of thickness on the transverse thermal conductivity of thin dielectric films
    • Griffin, A.J.Jr, Brotzen, F.R., 1994. Effect of thickness on the transverse thermal conductivity of thin dielectric films. J. Appl. Phys., 75(8):3761-6737.
    • (1994) J. Appl. Phys. , vol.75 , Issue.8 , pp. 3761-6737
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  • 5
    • 0031906650 scopus 로고    scopus 로고
    • Aerogel Airy Material: Structure, chemistry, structure, and properties
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    • Husing, N.1    Schubert, U.2
  • 6
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    • Ordered meso-porous polymers of tunable pore size from colloidal silica templates
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    • (1999) Science , vol.283 , pp. 963-966
    • Johnson, S.A.1    Ollivier, P.J.2    Mallouk, T.E.3
  • 10
    • 0028396379 scopus 로고
    • Heat treatment of spun-on acid-catalyzed sol-gel silica films
    • Parrill, T.M., 1994. Heat treatment of spun-on acid-catalyzed sol-gel silica films. J. Mater. Res., 9:723-728.
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  • 11
    • 0037097910 scopus 로고    scopus 로고
    • Measurement of thermal conductivity of silicon dioxide thin films using a 3ω method
    • Tsuneyuki, Y., Nagai, N., Katayama, S., Todoki, M., 2002. Measurement of thermal conductivity of silicon dioxide thin films using a 3ω method. J. Appl. Phys., 91(12): 9772-9779.
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    • Tsuneyuki, Y.1    Nagai, N.2    Katayama, S.3    Todoki, M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.