Rapid thermal oxidation of silicon nanowires

Applied Physics Letters

Volumn 94, Issue 6, 2009, Pages

  Krylyuk, Sergiy ^a,b   Davydov, Albert V ^a   Levin, Igor ^a   Motayed, Abhishek ^a   Vaudin, Mark D ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC WIRE; NANOWIRES; OXYGEN; REGENERATORS;

DRY OXYGENS; EXPOSURE TIME; OXIDATION RATES; OXIDATION-KINETICS; OXIDE SHELLS; RAPID THERMAL OXIDATIONS; SILICON NANOWIRES;

OXIDATION;

EID: 60349122551     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3079395     Document Type: Article

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