Characterization of carbon nanofibers synthesized by microwave plasma-enhanced CVD at low-temperature in a CO/Ar/O2 system

Diamond and Related Materials

Volumn 18, Issue 4, 2009, Pages 678-681

  Mori, Shinsuke ^a   Suzuki, Masaaki ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Carbon monoxide; Carbon nanofibers; Low temperature synthesis; Microwave discharge; Plasma enhanced CVD

Indexed keywords

CARBON MONOXIDE; CARBON NANOFIBERS; CARBON NANOTUBES; CHARACTERIZATION; CHEMICAL BONDS; ELECTRIC DISCHARGES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GROWTH (MATERIALS); MICROWAVES; NANOFIBERS; OXYGEN; PLASMA DEPOSITION; PLASMAS; SUBSTRATES; SYNTHESIS (CHEMICAL);

CARBON CHAINS; DOUBLE BONDS; ELEMENTARY PROCESS; FT-IR SPECTRUM; GAS-PHASE; LOW TEMPERATURES; LOW-TEMPERATURE SYNTHESIS; MICROWAVE DISCHARGE; MICROWAVE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITIONS; MICROWAVE PLASMAS; OXYGEN CONCENTRATIONS; OXYGEN-CONTAINING GROUPS; PLASMA-ENHANCED CVD; RATE-DETERMINING STEPS; SINGLE BONDS; SUBSTRATE TEMPERATURES; VERTICALLY ALIGNED;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 60249100189     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2009.01.002     Document Type: Article

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