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Volumn 203, Issue 12, 2009, Pages 1596-1603
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Grain size effect on structural, electrical and mechanical properties of NiTi thin films deposited by magnetron co-sputtering
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Author keywords
DC magnetron co sputtering; Electrical resistance; NiTi thin films; Surface morphology; Thermal coefficient of resistance
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Indexed keywords
ALLOYS;
ATOMIC PHYSICS;
CRYSTAL ATOMIC STRUCTURE;
CRYSTAL STRUCTURE;
CRYSTALLIZATION;
ELECTRIC PROPERTIES;
ELECTRODEPOSITION;
FIELD EMISSION;
FOURIER TRANSFORMS;
GRAIN SIZE AND SHAPE;
MAGNETRONS;
MARTENSITE;
MECHANICAL PROPERTIES;
METALLIC COMPOUNDS;
MICROSCOPES;
NANOCRYSTALLINE ALLOYS;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SURFACE ANALYSIS;
SURFACE MORPHOLOGY;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY ANALYSIS;
ATOMIC FORCE MICROSCOPES;
AUSTENITE PHASE;
DC MAGNETRON CO-SPUTTERING;
DEPTH RECOVERIES;
DURING PHASE;
ELECTRICAL AND MECHANICAL PROPERTIES;
ELECTRICAL PROPERTIES;
ELECTRICAL RESISTANCE;
FIELD-EMISSION SCANNING ELECTRON MICROSCOPES;
GRAIN SIZE EFFECTS;
GRAIN SIZES;
HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPES;
HOT STAGES;
IN-SITU;
LOW HARDNESS;
MARTENSITE PHASE;
MEMS APPLICATIONS;
MICRO-STRUCTURAL CHANGES;
NANO-INDENTATION TESTS;
NITI FILMS;
NITI THIN FILMS;
PHASE TRANSFORMATION BEHAVIORS;
PROBE RESISTIVITIES;
ROOM TEMPERATURES;
SHAPE MEMORY ALLOYS;
SI (100) SUBSTRATES;
STRUCTURAL FEATURES;
STRUCTURE CHANGES;
SUBSTRATE TEMPERATURES;
TEMPERATURE RANGES;
THERMAL COEFFICIENT OF RESISTANCE;
X-RAY DIFFRACTIONS;
SUBSTRATES;
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EID: 59849116448
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2008.12.005 Document Type: Article |
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Times cited : (60)
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References (27)
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