Fabrication and characterization of sputtered NiTi shape memory thin films

Journal of Micromechanics and Microengineering

Volumn 16, Issue 1, 2006, Pages 101-108

  Wibowo, E ^a   Kwok, C Y ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

HEATING; NICKEL ALLOYS; PHASE TRANSITIONS; SPUTTERING; SUBSTRATES; THERMAL EFFECTS; THIN FILMS;

ATOMIC COMPOSITION; NITI FILMS; SPUTTERING CONDITIONS; SUBSTRATE HEATING;

SHAPE MEMORY EFFECT;

EID: 29144473494     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/1/014     Document Type: Article

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