Improvement of CBRAM resistance window by scaling down electrode size in pure-GeTe film

IEEE Electron Device Letters

Volumn 30, Issue 2, 2009, Pages 120-122

  Choi, Sang Jun ^a   Lee, Jung Hyun ^a   Bae, Hyung Jin ^a   Yang, Woo Young ^a   Kim, Tae Wan ^b   Kim, Ki Hong ^a  

^a SAMSUNG Electronics   (South Korea)

^b Sejong University   (South Korea)

Author keywords

Conductive bridging random access memory (CBRAM); Cu; Dry process; E beam lithography; GeTe; On off ratio; Scaling down; TaN

Indexed keywords

BIPOLAR SEMICONDUCTOR DEVICES; ELECTRON BEAM LITHOGRAPHY; RANDOM ACCESS STORAGE; SEMICONDUCTOR DEVICES; SILVER; TANNING; TANTALUM COMPOUNDS;

CONDUCTIVE BRIDGING RANDOM ACCESS MEMORY (CBRAM); CU; DRY PROCESS; E-BEAM LITHOGRAPHY; GETE; ON/OFF RATIO; SCALING DOWN; TAN;

COPPER;

EID: 59649097566     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2008.2009774     Document Type: Article

References (6)

1. 2," IEEE Trans. Electron Devices, vol. 54, no. 10, pp. 2762-2768, Oct. 2007.
2. G. Muller, T. Happ, M. Kund, G. Y. Lee, N. Nagel, and R. Sezi, "Status and outlook of emerging nonvolatile memory technologies," in IEDM Tech. Dig., 2004, pp. 567-570.
3. R. Symanczk, M. Balakrishnan, C. Gopalan, T. Happ, M. N. Kozicki, M. Kund, T. Mikolajick, M. Mitkova, M. Park, C. Pinnow, J. Robertson, and K. Ufert, "Electrical characterization of solid state ionic memory elements," in Proc. NVMTS Tech. Dig., 2003, pp. 17-22.
4. M. N. Kozicki, M. Mitkova, M. Park, M. Balakrishnan, and C. Gopalan, "Information storage using nanoscale electrodeposition of metal in solid electrolytes," Superlattices Microstruct., vol. 34, no. 3-6, pp. 459-465, Sep.-Dec. 2003.
5. 5 thin films by metal organic chemical vapor deposition for phase change memory applications," Appl. Phys. Lett., vol. 89, no. 10, pp. 102 107-1-102 107-3, Sep. 2006.
6. I. H. Park, J. W. Lee, and C. W. Chung, "Investigation on etch characteristics of GeSbTe thin films for phase-change memory," Integr. Ferroelectr., vol. 80, no. 1, pp. 207-218, Nov. 2006.