Atomic force microscope for accurate dimensional metrology

Proceedings of the 20th Annual ASPE Meeting, ASPE 2005

Volumn , Issue , 2005, Pages

  Mazzeo, A D ^a   Stein, A J ^b   Hocken, R J ^c   Trumper, D L ^a  

^a Massachusetts Institute of Technology   (United States)

^b ZYGO CORPORATION   (United States)

^c University of North Carolina at Charlotte   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84884831567     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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2. Emile Durand. Problemes Generaux Conducteurs, pages 207-210. Électrostatique, Masson et Cie, Editors, Paris, 1966.
3. Robert D. Grober, Jason Acimovic, Jim Schuck, Dan Hessman, Peter J. Kindlemann, Joao Hespanha, A. Stephen Morse, Khaled Karrai, Ingo Tiemann, and Stephan Manus. Fundamental limits to force detection using quartz tuning forks. Review of Scientific Instruments, 74(7):2776-80, 2000.
4. C. L. Jahncke and H. D. Hallen. Stabilizing wide bandwidth, tuning fork detected force feedback with nonlinear interactions. Journal of Applied Physics, 93(2):1274-82, January 2003.
5. MathWorks. griddatan (matlab functions). http://www.mathworks.com/access/ helpdesk/helptechdoc/ref/griddatan.html, Accessed Dec 2004.
6. Aaron David Mazzeo. Accurate capacitive sensing metrology for atomic force microscopy. Masters of science, Massachusetts Institute of Technology, Department of Mechanical Engineering, August 2005.
7. A. G. T. Riter, J. A. Veerman, K. O. van der Werf, and N. F. van Hulst. Dynamic behavior of tuning fork shear-force feedback. American Institute of Physics, 71(1):28-30, July 1997.
8. William R. Smythe. Static and Dynamic Electricity. International Series in Pure and Applied Physics. McGraw-Hill Book Company, Inc., New York, second edition, 1950.
9. Andrew John Stein. A metrological atomic force microscope. Masters of science, Massachusetts Institute of Technology, Department of Mechanical Engineering, September 2002.