A neural-network approach for defect recognition in TFT-LCD photolithography process

IEEE Transactions on Electronics Packaging Manufacturing

Volumn 32, Issue 1, 2009, Pages 1-8

  Chen, Li Fei ^a   Su, Chao Ton ^b   Chen, Meng Heng ^b  

^a FU JEN CATHOLIC UNIVERSITY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Defect; Liquid crystal display (LCD); Neural network; Photolithography process; Thin film transistor (TFT)

Indexed keywords

DEFECTS; FEEDFORWARD NEURAL NETWORKS; LIGHT SOURCES; LIQUID CRYSTALS; NEURAL NETWORKS; PHOTOLITHOGRAPHY; RADIAL BASIS FUNCTION NETWORKS; SEMICONDUCTING ORGANIC COMPOUNDS; SPURIOUS SIGNAL NOISE; THIN FILM DEVICES; THIN FILM TRANSISTORS; TRANSISTORS; VECTOR QUANTIZATION;

DEFECT; LIQUID CRYSTAL DISPLAY (LCD); NEURAL-NETWORK; PHOTOLITHOGRAPHY PROCESS; THIN-FILM TRANSISTOR (TFT);

LIQUID CRYSTAL DISPLAYS;

EID: 59149098768     PISSN: 1521334X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TEPM.2008.926117     Document Type: Article

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