Diagnostic of 13.56 MHz RF sustained Ar-N2 plasma by optical emission spectroscopy

EPJ Applied Physics

Volumn 45, Issue 1, 2009, Pages

  Khan, F U ^a   Rehman, N U ^b   Naseer, S ^c   Naveed, M A ^b   Qayyum, A ^d   Khattak, N A D ^a   Zakaullah, M ^b  

^a GOMAL UNIVERSITY   (Pakistan)

^b QUAID I AZAM UNIVERSITY   (Pakistan)

^c UNIVERSITY OF PESHAWAR   (Pakistan)

^d National Tokamak Fusion Program Islamabad   (Pakistan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATOMIC SPECTROSCOPY; DISSOCIATION; ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; INERT GASES; LEAKAGE (FLUID); LIGHT EMISSION; MOLECULAR SPECTROSCOPY; NITROGEN; OPTICAL EMISSION SPECTROSCOPY; PHOTORESISTS; PLASMA DIAGNOSTICS; PLASMAS; SPECTRUM ANALYSIS;

ACTIVE SPECIES; ARGON GAS; ARGON METASTABLES; BOLTZMANN; CONCENTRATION OF; DISSOCIATION PROCESS; EMISSION INTENSITIES; EMISSION LINES; FIRST NEGATIVE SYSTEMS; NITROGEN DISSOCIATIONS; NITROGEN PLASMAS; OPTICAL EMISSIONS; RADIO FREQUENCIES;

INTEGRATED OPTOELECTRONICS;

EID: 59049091319     PISSN: 12860042     EISSN: 12860050     Source Type: Journal    
DOI: 10.1051/epjap:2008198     Document Type: Article

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