Development of ultrahigh vacuum-atomic force microscopy with frequency modulation detection and its application to electrostatic force measurement

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 1543-1546

  Uchihashi, Takayuki ^a   Ohta, Masahiro ^b   Sugawara, Yasuhiro ^b   Yanase, Yoshio ^c   Sigematsu, Tatsuhiko ^c   Suzuki, Mineharu ^d   Morita, Seizo ^b  

^a HIROSHIMA UNIVERSITY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

^c SUMCO CORPORATION   (Japan)

^d NTT Advanced Technology Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5844222583     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589396     Document Type: Article

References (22)

1. F. Ohnensorge and G. Binnig, Science 260, 1451 (1993).
2. F. J. Giessible, Science 267, 68 (1995).
3. Y. Martin, C. C. Williams, and H. K. Wickramasinghe, J. Appl. Phys. 61, 4723 (1987).
4. B. D. Terns, J. E. Stern, D. Rugar, and H. J. Mammin, Phys. Rev. Lett. 63, 2669 (1989).
5. Y. Martin and H. K. Wickramasinghe, Appl. Phys. Lett. 50, 1455 (1987).
6. C. Shönenberger and S. F. Alvarado, Phys. Rev. Lett. 65, 3162 (1990).
7. S. Morita, Y. Fukano, T. Uchihashi, T. Okusako, Y. Sugawara, Y. Yamanishi, and T. Oasa, Jpn. J. Appl. Phys. 1 32, L1701 (1993).
8. H. Yokoyama, K. Saito, and T. Inoue, Mol. Electron. Bioelectron. 3, 79 (1992).
9. T. R. Albrecht, P. Grütter, D. Home, and D. Rugar, J. Appl. Phys. 69, 668 (1991).
10. R. Lüthi, E. Meyer, L. Howald, D. Anselmetti, M. Dreier, H. Rüetschi, T. Bonner, R. M. Overney, J. Frommer, and H.-J. Güntherodt, J. Vac. Sci. Technol. B 12, 1673 (1994).
11. R. Lüthi, H. Haefke, K.-P. Meyer, E. Meyer, L. Howald, and H.-J. Güntherodt, J. Appl. Phys. 74, 7461 (1993).
12. A. Kikukawa, S. Hosaka, and R. Imura, Appl. Phys. Lett. 66, 3510 (1995).
13. A. Kikukawa, S. Hosaka, and R. Imura, Rev. Sci. Instrum. 67, 1463 (1996).
14. H. Rohrer, in Scanning Tunneling Microscopy and Related Methods (Kluwer Academic, Dordrecht, 1990), p. 1.
15. S. Kitamura and M. Iwatsuki, Jpn. J. Appl. Phys. 1 35, L668 (1996).
16. Y. Sugawara, M. Ohta, H. Ueyama, and S. Morita, Science 270, 1646 (1995).
17. H. Ueyama, M. Ohta, Y. Sugawara, and S. Morita, Jpn. J. Appl. Phys. 1 34, L1086 (1995).
18. M. Yasutake, Jpn. J. Appl. Phys. 1 34, 3403 (1995).
19. K. Takayanagi, Y. Tanishiro, M. Takahashi, and S. Takahashi, J. Vac. Sci. Technol. A 3, 1502 (1985).
20. N. Nakagiri, M. Suzuki, K. Okiguchi, and H. Sugimura, Surf. Sci. Lett. 373, L329 (1997). 5-9-1 Tokodai, Tsukuba 300-26, Japan (private communication).
21. J. Itoh, Y. Tohma, T. Inoue, H. Yokoyam, and K. Shimizu, Jpn. J. Appl. Phys. 1 33, 7167 (1994).
22. Y. Fukano, T. Uchihashi, T. Okusako, K. Hontani, A. Chayahara, Y. Sugawara, Y. Yamanishi, T. Oasa, and S. Morita, Proceedings of the International Conference on Advanced Microelectronic Device and Processing, Sendai, 1994 (Tohoku University Press, Sendai, 1994), p. 365.