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Applied Physics Letters

Volumn 94, Issue 2, 2009, Pages

Wafer-bonded single-crystal silicon slot waveguides and ring resonators

(4) Briggs, Ryan M a Shearn, Michael a Scherer, Axel a Atwater, Harry A a

a California Institute of Technology (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC LOSSES; OPTICAL RESONATORS; SILICON ON INSULATOR TECHNOLOGY; SILICON OXIDES; SILICON WAFERS; SINGLE CRYSTALS; WAFER BONDING; WAVEGUIDES;

INSULATOR WAFER; LOW ORDER; PROPAGATION LOSS; RING RESONATOR; SI SUBSTRATES; SI-ON-INSULATOR; SINGLE CRYSTAL SILICON; SLOT WAVEGUIDE; SLOT-RING; WAVEGUIDE-RESONATORS;

SILICA;

EID: 58349097982 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3070541 Document Type: Article

Times cited : (17)

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