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Applied Physics A: Materials Science and Processing

Volumn 94, Issue 3, 2009, Pages 593-600

Molecular dynamics study of groove fabrication process using AFM-based nanometric cutting technique

(5) Zhang, Junjie a Sun, Tao a Yan, Yongda a Liang, Yingchun a Dong, Shen a

a HARBIN INSTITUTE OF TECHNOLOGY (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC PHYSICS; FABRICATION; MOLECULAR DYNAMICS; QUANTUM CHEMISTRY; THREE DIMENSIONAL;

ATOMIC FORCES; ATOMIC SCALES; FABRICATION PROCESSES; GROOVE GEOMETRIES; LATERAL FORCES; MATERIAL ANISOTROPIES; MOLECULAR DYNAMICS SIMULATIONS; NANOMETRIC CUTTINGS; NORMAL FORCES; RESULTANT FORCES; SURFACE QUALITIES; TWO TYPES;

DYNAMICS;

EID: 58349092714 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-008-4903-6 Document Type: Article

Times cited : (43)

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