|
|
Volumn 209, Issue 2, 2009, Pages 973-977
|
|
Low temperature processing of high conductivity and high transparency indium-tin-oxide/Ag alloy/indium-tin-oxide multilayered thin films
a,b
|
|
Author keywords
ITO; Multilayers; Sheet resistance; Surface roughness; Transmission; Work function
|
|
Indexed keywords
ELECTRIC RESISTANCE;
ENERGY ABSORPTION;
FILM PREPARATION;
FRICTION;
FUNCTIONS;
INDIUM;
METAL ANALYSIS;
MULTILAYER FILMS;
MULTILAYERS;
OPTICAL PROPERTIES;
OXIDE FILMS;
OXYGEN;
PLASMA APPLICATIONS;
PROBABILITY DENSITY FUNCTION;
SHEET RESISTANCE;
SOLIDS;
SUBSTRATES;
SURFACE PROPERTIES;
SURFACE ROUGHNESS;
THIN FILMS;
TIN;
TITANIUM COMPOUNDS;
TRANSPARENCY;
WORK FUNCTION;
ATOMIC FORCES;
DIRECT CURRENTS;
GLASS SUBSTRATES;
HIGH CONDUCTIVITIES;
HIGH TRANSMISSIONS;
HIGH TRANSPARENCIES;
IN LINES;
INDIUM TIN OXIDES;
ITO;
ITO FILMS;
ITO LAYERS;
LOW TEMPERATURES;
MULTILAYERED FILMS;
MULTILAYERED THIN FILMS;
OXYGEN PLASMAS;
OXYGEN PRESSURES;
PROCESSING PARAMETERS;
SPUTTERING SYSTEMS;
SUBSTRATE TEMPERATURES;
SURFACE RESISTANCE;
|
|
EID: 58149156694
PISSN: 09240136
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jmatprotec.2008.03.015 Document Type: Article |
|
Times cited : (12)
|
|
References (10)
|
