Imaging ultrafine grains in machined tantalum subsurface using a focused ion beam

Scripta Materialia

Volumn 59, Issue 3, 2008, Pages 301-304

  Sarkar, J ^a   Gilman, P S ^a  

^a PRAXAIR INC   (United States)

Author keywords

Deformation structure; Metals and alloys; Nanostructure

Indexed keywords

ELECTRONS; FOCUSED ION BEAMS; MICROSTRUCTURE; TANTALUM COMPOUNDS;

DEFORMATION STRUCTURES; ION INDUCED SECONDARY ELECTRONS;

GRAIN SIZE AND SHAPE;

EID: 44449153413     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2008.03.027     Document Type: Article

References (29)

1. Holloway K., Fryer P.M., Cabral Jr. C., Harper J.M.E., Bailey P.J., and Keleher K.H. J. Appl. Phys. 71 (1992) 5433
2. Wang S.-Q., Suthar S., Hoeflich C., and Burrow B.J. J. Appl. Phys. 73 (1993) 2301
3. Ohring M. The Materials Science of Thin Films (1992), Academic Press, Boston, MA
4. P. Kumar, U.S. Patent No. 5,580,516, 3 December 1996.
5. S.P. Turner, U.S. Patent No. 6,331,233, 3 December 2001.
6. H.J. Koenigsmann, P.S. Gilman, U.S. Patent No. 7,081,148, 25 July 2006.
7. J.A. Dunlop, M. Goldstein, G.B. Feldewerth, C. Shim, S. Schittny, U.S. Patent No. 6030514, 29 February 2000.
8. Y. Yamakoshi, H. Miyashita, K. Seki, U.S. Patent No. 6153315, 28 November 2000.
9. J.E. Joyce, T.J. Hunt, P.S. Gilman, U.S. Patent No. 6309556, 30 October 2001.
10. H. Takahashi, T. Ohhashi, K. Seki, U.S. Patent No. 6284111, 4 September 2001.
11. Prevey P.S. In: Davis J.R., and Destefani J.D. (Eds). X-ray Diffraction Residual Stress Techniques in Materials Characterization. Metals Hand Book Series (1986), ASM, Metals Park, OH 380-392
12. Phaneuf M.W. Micron 30 (1999) 277
13. Volkert C.A., and Minor A.M. MRS Bulletin 32 (2007) 389
14. Phaneuf M.W. In: Giannuzzi L.A., and Stevie F.A. (Eds). FIB for Materials Science Applications in Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice (2005), Springer, New York 143-172
15. Campbell C.E., Bendersky L.A., Boettinger W.J., and Ivester R. Mater. Sci. Eng., A 430 (2006) 15
16. Shih H.K., Murr L.E., Niou C.-S., and Zernow L. Scripta Metall. Mater. 29 (1993) 1291
17. Gurevitch A.C., Murr L.E., Shih H.K., Niou C.-S., Advani A.H., Manuel D., and Zernow L. Mater. Charact. 30 (1993) 201
18. Murr L.E., Shih H.K., and Niou C.-S. Mater. Charact. 33 (1994) 65
19. Meyers M.A., Chen Y.-J., Marquis F.D.S., and Kim D.S. Metall. Mater. Trans. A 26 (1995) 2493
20. Nesterenko V.F., Meyers M.A., LaSalvia J.C., Bondar M.P., Chen Y.J., and Lukyanov Y.L. Mater. Sci. Eng., A 229 (1997) 23
21. Nemat-Nasser S., Isaacs J.B., and Liu M. Acta Mater. 46 (1998) 1307
22. Beckenhaur D., Niessen P., and Pick P. J. Mater. Sci. 12 (1993) 449
23. Trent E.M. Wear 128 (1988) 65
24. Wang Z.Y., and Rajurkar K.P. Wear 239 (2000) 168
25. Zurecki Z., Ghosh R., and Frey J.H. Int. J. Powder Metall. 40 (2004) 19
26. Ni H., and Alpas A.T. Mater. Sci. Eng., A 361 (2003) 338
27. Swaminathan S., Ravi Shankar M., Lee S., Hwang J., King A.H., Kezar R.F., Rao B.C., Brown T.L., Chandrasekhar S., Compton W.D., and Trumble K.P. Mater. Sci. Eng., A 410-411 (2005) 385
28. Shin D.H., Kim B.C., Kim Y.-S., and Park K.-T. Acta Mater. 48 (2000) 2247
29. Han K., Embury J.D., Sims J.R., Campbell L.J., Schneider-Muntau H.-J., Pantsyrnyi V.I., Shikov A., Nikulin A., and Vorobieva A. Mater. Sci. Eng., A 267 (1999) 99