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Volumn 28, Issue 6, 2008, Pages 566-569
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Growth of al-doped ZnO films by mid frequency DC magnetron sputtering
a
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Author keywords
AZO films; C axis preferential orientation; Middle frequency direct current magnetron sputtering; Optical absorption edge
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Indexed keywords
ABSORPTION;
ALUMINA;
ALUMINUM;
ELECTROMAGNETIC WAVE ABSORPTION;
ENERGY ABSORPTION;
FILM GROWTH;
GAS ABSORPTION;
GROWTH (MATERIALS);
LIGHT ABSORPTION;
MAGNETRON SPUTTERING;
MAGNETRONS;
METALLIC FILMS;
MICROSTRUCTURE;
SEMICONDUCTING ZINC COMPOUNDS;
SUBSTRATES;
X RAY ANALYSIS;
ZINC;
ZINC OXIDE;
ABSORPTION EDGES;
AZO FILMS;
C-AXIS PREFERENTIAL ORIENTATION;
FILM DROPS;
FOUR POINTS;
GAS PRESSURES;
GLASS SUBSTRATES;
GROWTH CONDITIONS;
MID FREQUENCIES;
MIDDLE-FREQUENCY DIRECT CURRENT MAGNETRON SPUTTERING;
OPTICAL ABSORPTION EDGE;
OXIDES FILMS;
RED SHIFTS;
SUBSTRATE TEMPERATURES;
TARGET POWERS;
TEMPERATURE RISES;
X-RAY DIFFRACTIONS;
ZNO FILMS;
OPTICAL FILMS;
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EID: 57849125069
PISSN: 16727126
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (3)
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References (13)
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