Pt-Pd-embedded silicon microwell arrays

Applied Physics Express

Volumn 1, Issue 6, 2008, Pages 0670031-0670033

  Asoh, Hidetaka ^a   Arai, Fusao ^a   Uchibori, Kota ^a   Ono, Sachiko ^a  

^a KOGAKUIN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; COLLOIDS; CRYSTALLOGRAPHY; ETCHING; HONEYCOMB STRUCTURES; HYDROFLUORIC ACID; HYDROGEN; HYDROGEN PEROXIDE; MICROCHANNELS; PALLADIUM; PLATINUM; POLYSTYRENES; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SILICON; SPHERES; THICK FILMS;

BINARY COLLOIDAL CRYSTALS; CHEMICAL ETCHINGS; HEXAGONAL ARRANGEMENTS; METAL CATALYSTS; METAL DEPOSITIONS; MICROWELL ARRAYS; PD FILMS; PD THIN FILMS; POLYSTYRENE SPHERES; SI SUBSTRATES; SILICA SPHERES;

PLATINUM METALS;

EID: 57649105057     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.1.067003     Document Type: Article

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