Infrared ellipsometric study of SiO2 films: Relationship between LO mode frequency and porosity

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 57-61

  Brunet Bruneau, A ^a   Fisson, S ^a   Gallas, B ^a   Vuye, G ^a   Rivory, J ^a  

^a SORBONNE UNIVERSITÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON GUNS; ELLIPSOMETRY; EVAPORATION; ION BOMBARDMENT; POROSITY; SILICA; THIN FILMS; VOLUME FRACTION; WATER ABSORPTION;

INFRARED ELLIPSOMETRIES;

AMORPHOUS FILMS;

EID: 5744253064     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01386-9     Document Type: Article

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