MEMS liquid metal through-wafer microstrip to microstrip transition

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2008, Pages 41-44

  Liu, Xiaoguang ^a   Katehit, Linda P B ^b   Peroulis, Dimitrios ^a  

^a PURDUE UNIVERSITY   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Liquid metal; Microfluidics; Microtrip transition; Power amplifiers; RF MEMS

Indexed keywords

CONTACT AREAS; EXTERNAL-; FABRICATION TECHNOLOGIES; HIGH POWERS; KEY COMPONENTS; METAL TRANSITIONS; MICRO-FLUIDIC; MICROPUMP; MICROPUMPS; MICROSTRIP; MICROSTRIP TRANSITIONS; MICROTRIP TRANSITION; RF MEMS; SWITCHING APPLICATIONS; TOXIC LIQUIDS;

LIQUID METALS; LIQUIDS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROFLUIDICS; MICROWAVES; POWER AMPLIFIERS; PUMPS;

METALS;

EID: 57349198008     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2008.4633098     Document Type: Conference Paper

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