Nanometer-level alignment to a substrate-embedded coordinate system

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 6, 2008, Pages 2341-2344

  Moon, Euclid E ^a   Smith, Henry I ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT MARKS; COORDINATE SYSTEMS; NANOMETER LEVELS; POLISHED SUBSTRATES;

SUBSTRATES;

ALIGNMENT;

EID: 57249094097     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3010734     Document Type: Article

References (7)

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4. E. E. Moon, L. Chen, P. N. Everett, M. K. Mondol, and H. I. Smith, J. Vac. Sci. Technol. B 21, 3112 (2003).
5. E. E. Moon, J. Lee, P. N. Everett, and H. I. Smith, J. Vac. Sci. Technol. B 16, 3631 (1998).
6. Euclid E. Moon, Ph.D. Thesis, Massachusetts Institute of Technology, 2004.
7. J. C. Montoya, C.-H. Chang, R. K. Heilmann, and M. K. Schattenburg, J. Vac. Sci. Technol. B 23, 2640 (2005).