Influence of substrates on initial growth of diamond-like carbon films

Applied Physics Express

Volumn 1, Issue 3, 2008, Pages 0350021-0350023

  Yasui, Nobuto ^a,b   Inaba, Hiroshi ^a   Ohtake, Naoto ^c  

^a HITACHI LTD   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^c NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND FILMS; DIAMOND LIKE CARBON FILMS; DIAMONDS; ELECTRIC LOAD MANAGEMENT; FILMS; GROWTH (MATERIALS); MASS SPECTROMETRY; NEON; PHOTOELECTRON SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY; SILICON; SUBSTRATES; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

BONDING STRUCTURES; DIAMOND-LIKE CARBONS; DLC FILMS; FILTERED CATHODIC VACUUM ARCS; SECONDARY ION MASS SPECTROSCOPIES; SUBSTRATE MATERIALS; X-RAY PHOTOELECTRON SPECTROSCOPIES;

CARBON FILMS;

EID: 57049188362     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.1.035002     Document Type: Article

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